SBS-150 少子寿命

Simple, flexible scanning tool offers a 2D profile of silicon growth quality. Built for simplicity and safety in production environments, with a sophisticated data analysis package enabling research and development.

Product Overview

Measuring as-grown blocks provides the best indication of final wafer lifetime.The SBS-150 bulk-silicon lifetime analyzer is especially sensitive to lifetime variations in the growth direction of silicon ingots, giving an accurate preview of wafer quality and propagation defects.

It addition, the SBS-150 offers the only lifetime scan with a lifetime measurement range of several orders of magnitude – a feature that is typical of Sinton Instruments true bulk lifetime characterization.
 
 
 
 
System Capabilities

Primary applications:

  
Example of lifetime map, taken at a medium resolution. Similar maps of resistivity and trap density are also standard.

larger view

• Qualifying high-purity silicon with lifetimes in the 1–5 millisecond range
 
• Qualifying B-Cz silicon as-grown, without special surface preparation
 
• Characterizing lifetime, trap density and defect zones in multicrystalline blocks
 

Product features:

• Proximity sensor scan in the X-Y plane
 
• True bulk lifetime characterization using broadband IR excitation
 
• Ergonomic loading and unloading tray
 
• Easy-to-yse, intuitive operator controls
 
• Industry-compliant interlocks and enclosure ensure operator safety
 
• Configurable for top-loading