CDE

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四探针电阻值测试系统

CDE Resmap 系统满足你所有的需求。不管是在研究实验室还是需要高净化要求的半导体生产车，它都可以完成连续24/7片从低到高,多数量连续测试的需求。不论你是在化学研磨抛光（CMP）,扩散，离子注入部门，或者在导电薄膜研究， CDE的 RESMAP 系统可以满足您工艺上和测量需求发展上甚至是预算方面的要求。

Resmap系统提供的是准确、可重复使用的，快速、持久、先进的测量设备。如今，全新的多探针测试系统 Resmap 400系列为您提供功能最全面，性价比最高的测量设备


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Fast, accurate, versatile . . .
ResMap systems deliver advanced metrology that is accurate, repeatable, fast and affordable. The new multi-probe capabilities of the 400-Series of ResMap systems make them the most versatile, cost-effective metrology systems available today.

(Please click on the ResMap model numbers below for individual model specifications.)

For a comparison chart of standard ResMap systems, please click here.

For information regarding solar ResMap systems, please click here.

For information regarding third-party used ResMap systems, please click here.

ResMap 168

	Auto- loading cassette 4" - 8" wafer auto load 2" - 8" wafer manual load Table top model Fast measurement time Wide variety of mapping patterns

ResMap 463-FOUP

	300mm wafer FOUP Dual or quad probe changer Adaptor for 300mm & 200mm cassette Stand-alone system Mini-environment

ResMap 273

	300mm wafer capability 2" - 12" wafer manual load Table top model Fast measurement time Wide variety of mapping patterns

ResMap 463-OC

	300mm wafer auto load 200mm, 150mm options Manual load any size Dual or quad probe changer Stand-alone system Wide variety of mapping patterns

ResMap 178

	200mm wafer capability 2" - 8" wafer manual load Table top model Fast measurement time Wide variety of mapping patterns

ResMap 468-SMIF

	200mm wafer SMIF Dual or quad probe changer Mini-environment Stand-alone system Wide variety of mapping patterns

光伏测试专用美国ResMap四点探针

光伏测试专用美国ResMap四点探针针：CDE ResMap的特点如简述如下: * 高速稳定及专利自动决定范围量测与传送,THROUGHPUT高 * 数字方式及每点高达4000笔数据搜集,表现良好重复性及再现性 * Windows 操作接口及软件操作简单 * 新制程表现佳 (铜制程低电阻率1.67mΩ-cm及Implant高电阻2KΩ/□以上,皆可达成高精确度及重复性) * 体积小,占无尘室面积少 * 校正简单,且校正周期长 * 可配合客户需求,增强功能与适用性 * 300mm 机种可

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半导体行业专用CDE ResMap 四点探针

CDE　ResMap–CDE　公司生产之电阻值测试系统是以四探针的工艺，以配合各半导体成光伏生产厂家进出之生产品质监控，既超卓可靠又简易操作的设备是半导体及光伏生产厂家不可缺少的

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四探针电阻值测试系统

光伏测试专用美国ResMap四点探针

半导体行业专用CDE ResMap 四点探针

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